Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120292 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more | 2018-11-06 |
| 10001713 | Lithographic apparatus and method | Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Louis John Markoya +3 more | 2018-06-19 |
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Sven Antoin Johan Hol, Yang-Shan Huang, Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2018-03-20 |