Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Sven Antoin Johan Hol, Yang-Shan Huang, Antonius Franciscus Johannes De Groot | 2018-03-20 |