Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt +6 more | 2018-08-28 |
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sven Antoin Johan Hol, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2018-03-20 |
| 9910367 | Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing method | — | 2018-03-06 |