Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095123 | Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program | Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Jan Van Eijk | 2018-10-09 |
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Adrianus Marinus Wouter Heeren, George Alois Leonie Leenknegt +6 more | 2018-08-28 |