Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095123 | Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program | Marinus Maria Johannes Van De Wal, Jeroen Johannes Theodorus Hendrikus De Best, Jan Van Eijk | 2018-10-09 |
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Hans Butler, Nic Jasper Dirkx, Ramidin Izair Kamidi, Wilhelmus Franciscus Johannes Simons | 2018-03-27 |
| 9897926 | Stage positioning system and lithographic apparatus | Lucas Koorneef, Theo Anjes Maria Ruijl, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen, Jan Van Eijk +2 more | 2018-02-20 |