Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Hans Butler, Wilhelmus Henricus Theodorus Maria Aangenent, Ramidin Izair Kamidi, Wilhelmus Franciscus Johannes Simons | 2018-03-27 |