Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139735 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Sander Kerssemakers, Bart Smeets, Robertus Nicodemus Jacobus Van Ballegoij +1 more | 2018-11-27 |
| 10120293 | Object positioning in lithography | Ramidin Izair Kamidi, Yanin Kasemsinsup | 2018-11-06 |
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld, Derk Ten Hoopen +4 more | 2018-05-22 |
| 9946168 | Lithographic apparatus | — | 2018-04-17 |
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Ramidin Izair Kamidi, Wilhelmus Franciscus Johannes Simons | 2018-03-27 |