Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Hans Butler, Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Ramidin Izair Kamidi | 2018-03-27 |
| 9915877 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more | 2018-03-13 |