Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120293 | Object positioning in lithography | Hans Butler, Yanin Kasemsinsup | 2018-11-06 |
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Hans Butler, Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Wilhelmus Franciscus Johannes Simons | 2018-03-27 |