Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897926 | Stage positioning system and lithographic apparatus | Wilhelmus Henricus Theodorus Maria Aangenent, Lucas Koorneef, Theo Anjes Maria Ruijl, Stan Henricus Van Der Meulen, Jan Van Eijk +2 more | 2018-02-20 |