Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927711 | Actuation mechanism, optical apparatus and lithography apparatus | Andrea Lodovico Mancuso, Hendricus Johannes Maria Meijer, Erik Maria Rekkers, Marinus Johannes Maria Van Dam | 2018-03-27 |
| 9921494 | Lithographic apparatus comprising an actuator, and method for protecting such actuator | Theodorus Petrus Maria Cadee, Sander Christiaan Broers, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Bastiaan Lambertus Wilhelmus Marinus Van De Ven | 2018-03-20 |