Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146142 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2018-12-04 |
| 9927711 | Actuation mechanism, optical apparatus and lithography apparatus | Sven Antoin Johan Hol, Andrea Lodovico Mancuso, Erik Maria Rekkers, Marinus Johannes Maria Van Dam | 2018-03-27 |