Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088755 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen | 2018-10-02 |
| 10018925 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marco Polizzi, Michel Riepen +4 more | 2018-07-10 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9857695 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more | 2018-01-02 |