Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133190 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Cornelius Maria Rops | 2018-11-20 |
| 10095119 | Radiation source and method for lithography | Hendrikus Gijsbertus Schimmel, Reinier Theodorus Martinus Jilisen, Dennis De Graaf | 2018-10-09 |
| 10025196 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more | 2018-07-17 |
| 10018921 | Lithographic apparatus and a device manufacturing method | Cornelius Maria Rops, Nicolaas Rudolf Kemper | 2018-07-10 |
| 10018925 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more | 2018-07-10 |
| 9971255 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2018-05-15 |