Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018926 | Lithographic apparatus and method of manufacturing a lithographic apparatus | Rogier Hendrikus Magdalena Cortie, Andre Bernardus Jeunink, Adrianus Hendrik Koevoets, Jim Vincent Overkamp, Siegfried Alexander Tromp +2 more | 2018-07-10 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets, Leon Martin Levasier +3 more | 2018-05-29 |
| 9939738 | Lithographic apparatus and an object positioning system | Adrianus Hendrik Koevoets, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more | 2018-04-10 |