Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018924 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Jacobus Josephus Leijssen +3 more | 2018-07-10 |
| 10018926 | Lithographic apparatus and method of manufacturing a lithographic apparatus | Rogier Hendrikus Magdalena Cortie, Christianus Wilhelmus Johannes Berendsen, Andre Bernardus Jeunink, Adrianus Hendrik Koevoets, Jim Vincent Overkamp +2 more | 2018-07-10 |
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets +3 more | 2018-05-29 |
| 9915877 | Object holder and lithographic apparatus | Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more | 2018-03-13 |