Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133197 | Lithographic apparatus and device manufacturing method | Günes NAKIBOGLU, Frank Johannes Jacobus Van Boxtel, Thomas Petrus Hendricus Warmerdam, Jan Steven Christiaan Westerlaken | 2018-11-20 |
| 10095130 | Lithographic apparatus and method in a lithographic process | Kevin Nicolas Stephan Couteau, Rachid El Boubsi, Rob Johan Theodoor Rutten, Patrick Johannes Cornelus Hendrik Smulders, Martijn Lambertus Peter Visser +1 more | 2018-10-09 |