Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114298 | Conditioning system and lithographic apparatus comprising a conditioning system | Jan Steven Christiaan Westerlaken, Alexandrios Mathew | 2018-10-30 |
| 10095130 | Lithographic apparatus and method in a lithographic process | Johannes Pieter Kroes, Kevin Nicolas Stephan Couteau, Rachid El Boubsi, Patrick Johannes Cornelus Hendrik Smulders, Martijn Lambertus Peter Visser +1 more | 2018-10-09 |