Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971252 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2018-05-15 |