Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146136 | Reflecting coating with optimized thickness | Martin Endres, Stig Bieling | 2018-12-04 |
| 10061204 | Mirror, in particular for a microlithographic projection exposure apparatus | — | 2018-08-28 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |