Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161808 | Method and arrangement for determining the heating condition of a mirror in an optical system | Peter Vogt, Martin Hermann, Andras G. Major | 2018-12-25 |
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Frederik Bijkerk, Muharrem Bayraktar | 2018-06-12 |
| 9921483 | Surface correction of mirrors with decoupling coating | Tobias Hackl, Franz-Josef Stickel, Ulrich Loering, Tilmann Assmus, Juergen Mueller +2 more | 2018-03-20 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |