Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146138 | Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Robert Fichtl, Joachim Hartjes | 2018-12-04 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2018-07-24 |
| 9921483 | Surface correction of mirrors with decoupling coating | Oliver Dier, Tobias Hackl, Ulrich Loering, Tilmann Assmus, Juergen Mueller +2 more | 2018-03-20 |