Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146138 | Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Franz-Josef Stickel, Joachim Hartjes | 2018-12-04 |