Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Sascha Bleidistel, Alexander Wolf, Markus Schwab, Markus Hauf | 2018-12-25 |
| 10162270 | Projection exposure apparatus comprising a measuring system for measuring an optical element | Sascha Bleidistel, Toralf Gruner | 2018-12-25 |
| 10146138 | Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Franz-Josef Stickel, Robert Fichtl | 2018-12-04 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Michael Arnz, Sascha Bleidistel, Toralf Gruner, Markus Schwab | 2018-07-03 |