Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Toralf Gruner, Sascha Bleidistel, Alexander Wolf, Joachim Hartjes, Markus Hauf | 2018-12-25 |
| 10146033 | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit | — | 2018-12-04 |
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Heiko Feldmann, Erik Matthias Sohmen, Joachim Stuehler, Oswald Gromer, Ulrich Mueller +1 more | 2018-10-30 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Michael Arnz, Sascha Bleidistel, Toralf Gruner, Joachim Hartjes | 2018-07-03 |
| 9983483 | Illumination system of a microlithographic projection exposure apparatus | Michael Patra, Stig Bieling, Markus Deguenther, Frank Schlesener | 2018-05-29 |