Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114293 | Illumination system and projection objective of a mask inspection apparatus | Erik Matthias Sohmen, Joachim Stuehler, Oswald Gromer, Ulrich Mueller, Michael Layh +1 more | 2018-10-30 |
| 10101668 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Alexander Epple, Hans-Juergen Rostalski | 2018-10-16 |