Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139734 | Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit | Alexander Epple, Ralf Mueller | 2018-11-27 |
| 10101668 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Alexander Epple, Heiko Feldmann | 2018-10-16 |