Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10139734 | Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit | Ralf Mueller, Hans-Juergen Rostalski | 2018-11-27 |
| 10101668 | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same | Heiko Feldmann, Hans-Juergen Rostalski | 2018-10-16 |
| 10042146 | Catadioptric projection objective | Vladimir Kamenov, Toralf Gruner, Thomas Schicketanz | 2018-08-07 |