Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120176 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Toralf Gruner | 2018-11-06 |
| 10042146 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Toralf Gruner | 2018-08-07 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Oliver Dier, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |
| 9915876 | EUV mirror and optical system comprising EUV mirror | Hans-Jochen Paul, Christoph Zaczek | 2018-03-13 |