Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042146 | Catadioptric projection objective | Alexander Epple, Toralf Gruner, Thomas Schicketanz | 2018-08-07 |
| 9921483 | Surface correction of mirrors with decoupling coating | Oliver Dier, Tobias Hackl, Franz-Josef Stickel, Ulrich Loering, Tilmann Assmus +2 more | 2018-03-20 |