Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Oliver Natt, Gero Wittich, Timo Laufer, Peter Kuerz +7 more | 2018-07-24 |
| 9964859 | Lithography projection objective, and a method for correcting image defects of the same | Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer, Norbert Wabra | 2018-05-08 |
| 9921483 | Surface correction of mirrors with decoupling coating | Oliver Dier, Tobias Hackl, Franz-Josef Stickel, Tilmann Assmus, Juergen Mueller +2 more | 2018-03-20 |