Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964859 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Norbert Wabra | 2018-05-08 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Manfred Maul, Christoph Hennerkes, Johannes Ruoff | 2018-04-24 |