Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151982 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Damian Fiolka, Daniel Walldorf | 2018-12-11 |
| 10041836 | Polarization measuring device, lithography apparatus, measuring arrangement, and method for polarization measurement | — | 2018-08-07 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Manfred Maul, Christoph Hennerkes, Johannes Ruoff, Daniel Kraehmer | 2018-04-24 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss, Andras G. Major +5 more | 2018-04-17 |