Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Olaf Dittmann, Toralf Gruner, Gundula Weiss, Andras G. Major +5 more | 2018-04-17 |