Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161808 | Method and arrangement for determining the heating condition of a mirror in an optical system | Peter Vogt, Martin Hermann, Oliver Dier | 2018-12-25 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |
| 9897925 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Manfred Maul, Johannes Eisenmenger, Damian Fiolka +6 more | 2018-02-20 |