Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162270 | Projection exposure apparatus comprising a measuring system for measuring an optical element | Sascha Bleidistel, Joachim Hartjes | 2018-12-25 |
| 10162267 | Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations | Sascha Bleidistel, Alexander Wolf, Joachim Hartjes, Markus Schwab, Markus Hauf | 2018-12-25 |
| 10146137 | Catadioptric projection objective including a reflective optical component and a measuring device | Sascha Bleidistel, Christoph Zaczek, Ralf Mueller | 2018-12-04 |
| 10120176 | Catadioptric projection objective comprising deflection mirrors and projection exposure method | Thomas Schicketanz | 2018-11-06 |
| 10067424 | Illumination intensity correction device for predefining an illumination intensity over an illumination field of a lithographic projection exposure apparatus | Martin Endres | 2018-09-04 |
| 10048592 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Johannes Ruoff, Norbert Wabra, Ricarda Schoemer +1 more | 2018-08-14 |
| 10042146 | Catadioptric projection objective | Alexander Epple, Vladimir Kamenov, Thomas Schicketanz | 2018-08-07 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Michael Arnz, Sascha Bleidistel, Joachim Hartjes, Markus Schwab | 2018-07-03 |
| 10001631 | Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element | Boris Bittner, Norbert Wabra, Sonja Schneider, Ricarda Schoemer, Hendrik Wagner +6 more | 2018-06-19 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Gundula Weiss, Andras G. Major +5 more | 2018-04-17 |
| 9933710 | Projection exposure method and projection exposure apparatus | Stephan Andre, Daniel Golde, Johannes Ruoff | 2018-04-03 |