Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048592 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Toralf Gruner, Johannes Ruoff, Norbert Wabra, Ricarda Schoemer +1 more | 2018-08-14 |
| 9933710 | Projection exposure method and projection exposure apparatus | Stephan Andre, Toralf Gruner, Johannes Ruoff | 2018-04-03 |