Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146137 | Catadioptric projection objective including a reflective optical component and a measuring device | Sascha Bleidistel, Toralf Gruner, Ralf Mueller | 2018-12-04 |
| 9915876 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Hans-Jochen Paul | 2018-03-13 |