Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Thomas Schicketanz, Oliver Dier, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |
| 9915876 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Christoph Zaczek | 2018-03-13 |