Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061205 | Reflective optical element | Dirk Heinrich Ehm, Moritz Becker, Irene Ament, Gisela Von Blanckenhagen | 2018-08-28 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Christian Grasse +2 more | 2018-03-13 |