Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073361 | EUV lithography system and operating method | Stefan Schmidt, Edgar Osorio, Edwin Te Sligte, Mark Zellenrath, Hella Logtenberg | 2018-09-11 |
| 10061205 | Reflective optical element | Moritz Becker, Irene Ament, Gisela Von Blanckenhagen, Joern WEBER | 2018-08-28 |
| 9996005 | Reflective optical element and optical system for EUV lithography | Peter Huber, Stephan Muellender, Gisela Von Blanckenhagen | 2018-06-12 |
| 9880476 | Method for producing a capping layer composed of silicon oxide on an EUV mirror, EUV mirror, and EUV lithography apparatus | Gisela Von Blanckenhagen | 2018-01-30 |