Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061205 | Reflective optical element | Dirk Heinrich Ehm, Moritz Becker, Irene Ament, Joern WEBER | 2018-08-28 |
| 9996005 | Reflective optical element and optical system for EUV lithography | Dirk Heinrich Ehm, Peter Huber, Stephan Muellender | 2018-06-12 |
| 9880476 | Method for producing a capping layer composed of silicon oxide on an EUV mirror, EUV mirror, and EUV lithography apparatus | Dirk Heinrich Ehm | 2018-01-30 |