Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996005 | Reflective optical element and optical system for EUV lithography | Dirk Heinrich Ehm, Peter Huber, Gisela Von Blanckenhagen | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996005 | Reflective optical element and optical system for EUV lithography | Dirk Heinrich Ehm, Peter Huber, Gisela Von Blanckenhagen | 2018-06-12 |