Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Joern WEBER +2 more | 2018-03-13 |