Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113864 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Dirk Seidel, Gerd Klose | 2018-10-30 |
| 10012911 | Projection exposure apparatus with wavefront measuring device and optical wavefront manipulator | Sascha Bleidistel, Toralf Gruner, Joachim Hartjes, Markus Schwab | 2018-07-03 |