Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113864 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Dirk Seidel | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113864 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Dirk Seidel | 2018-10-30 |