Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113864 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Gerd Klose | 2018-10-30 |
| 10108085 | Method for localizing defects on substrates | Jan Hendrik Peters, Jörg Frederik Blumrich, Christoph Husemann | 2018-10-23 |
| 10089733 | Method for determining a position of a structure element on a mask and microscope for carrying out the method | — | 2018-10-02 |