Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151576 | Confocally chromatic sensor for determining coordinates of a measurement object | Nils Haverkamp | 2018-12-11 |
| 10108085 | Method for localizing defects on substrates | Jan Hendrik Peters, Jörg Frederik Blumrich, Dirk Seidel | 2018-10-23 |
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2018-09-04 |