Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Christoph Husemann, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2018-09-04 |
| 9904060 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Holger Seitz, Mario Laengle | 2018-02-27 |