Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Sascha Perlitz | 2018-09-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068325 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Sascha Perlitz | 2018-09-04 |